課程資訊
課程名稱
高科技廠房設施營建
High Tech Facility Design 
開課學期
99-2 
授課對象
工學院  土木工程學系  
授課教師
張陸滿 
課號
CIE7139 
課程識別碼
521 M7270 
班次
 
學分
全/半年
半年 
必/選修
選修 
上課時間
星期二A,B,C(18:25~21:05) 
上課地點
土研402 
備註
上課時間:18:30-21:30。大三以上可修習,但須經任課教師同意。與陳柏翰合開
總人數上限:60人 
Ceiba 課程網頁
http://ceiba.ntu.edu.tw/992_CE521_7270 
課程簡介影片
 
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課程概述

1. NANOTECHNOLOGY BASES
2. INTEGRATED CIRCUIT MANUFACTURING PROCESSES
3. FACTORY LAYOUT AND ARCHITECTURAL CONSTRUCTION
4. VIBRATION SOURCE, MEASUREMENTS.
5. HVAC CONSTRUCTION
6. ULTRA PURE WATER AND WASTE FACILITY CONSTRUCTION
7. POWER SYSTEMS CONSTRUCTION & GROUND SAFETY
8. DISTRIBUTED GAS & CHEMICAL SYSTEMS AND PIPING
9. EMERGENCY, SECURITY SYSTEMS AND AUTOMATIC CONTROL
AND INTELLIGENT FACTORY
10. CLEAN-BUILD & PROTOCOLS
11. CLEANROOM TESTING & COMMISSIONING
12. HIGH-TECH PROJECT MANAGEMENT
 

課程目標
THE PURPOSE OF THIS COURSE IS TO PROVIDE BASIC KNOWLEDGE NEEDED FOR FACILITIES THAT SUPPLEMENT HIGH-TECH MANUFACTURING. HIGH-TECH INCLUDES, NOT LIMITED TO, THE ADVANCED TECHNOLOGIES APPLIED IN THE FIELDS OF MICROELECTRONICS, OPTOELECTRONICS, PRECISION EQUIPMENT, TELECOMMUNICATION, NANOTECH, PHARMACEUTICS, BIOTECH, MEDICAL DEVICES, ANIMAL EXPERIMENT, AND AEROSPACE.
THE COURSE WILL ENABLE THE STUDENTS TO:
1. DIFFERENTIATE THE TYPICAL PROCESSES IN
SEMICONDUCTOR
2. CLASSIFY CLEANROOMS IN TERMS OF VARIOUS INTERNATIONAL STANDARDS.
3. SPECIFY THE ENVIRONMENTAL CONTROL CRITERIA FOR CLEANROOM IN TERMS OF TEMPERATURE AND HUMIDITY LEVEL, AIR/WATER QUALITY, PURITY OF CHEMICALS AND GASES, NOISE AND VIBRATION DEGREE, ELECTROMAGNETIC AND RADIO FREQUENCY INTERFERENCE, ELECTROSTATIC DISCHARGE, MATERIALS OUTGASSING, AND SAFE GROUNDING.
4. APPLY THE KNOWLEDGE IN TESTING AND COMMISSIONING CLEANROOM AND ITS ASSOCIATED FACILITIES.
5. LINK TO THE INFORMATION SOURCES FOR FURTHER STUDIES IN NANO/MICRO FABRICATION AND RESEARCH.
 
課程要求
 
預期每週課後學習時數
 
Office Hours
 
指定閱讀
 
參考書目
1. WHYTE, W., CLEANROOM TECHNOLOGY, JOHN WILEY, NEW YORK 2001 
評量方式
(僅供參考)
   
課程進度
週次
日期
單元主題
Week 1
2/22  Course Introduction
History and Fundamentals of Integrated Circuit
 
Week 2
3/01  Nanotechnology Bases and Critical Technologies of High-Tech Fab/Plant & Related Facilities 
Week 3
3/08  High-tech Facility Construction Management Overview 
Week 4
3/15  Economics & Profitability of Wafer Manufacturing Industry 
Week 5
3/22  Clean Construction and Protocols  
Week 6
3/29  Clean Construction of High Purity Utilities, Ultra Pure Piping, Hook-Up & Tool-Up.  
Week 7
4/05  NTU Book-Study Holidays. No Class. 
Week 8
4/12  Facility Start up, Commissioning and Cleanroom Verification 
Week 9
4/19  No Class. No Mid-term Exam, Field Trips on 3/19, 5/8 
Week 10
4/26  TFT, Photovoltaic, and LED Manufacturing Processes & Construction 
Week 11
5/03  Project Management Planning & Scheduling 
Week 12
5/10  Fab Construction Project Management & Application of PMI’s Project Management of Body of Knowledge (PMBOK) 
Week 13
5/17  Scheduling, Time & Cost Trade-off for Crashing Schedule, and 4D Construction 
Week 14
5/24  LEED and Green Building Construction 
Week 15
5/31  Construction Ethics, Legal Aspects and International Construction 
Week 16
6/07  Safety, Quality, Security and Risk Management
 
Week 17
6/14  Term Project Presentation