課程資訊
課程名稱
高科技廠房設施營建
HIGH TECH FACILITY DESIGN 
開課學期
98-2 
授課對象
工學院  營建工程與管理組  
授課教師
張陸滿 
課號
CIE7139 
課程識別碼
521 M7270 
班次
 
學分
全/半年
半年 
必/選修
選修 
上課時間
星期二A,B,C(18:25~21:05) 
上課地點
土研402 
備註
上課時間:18:30-21:30 大三以上可修習,但須經任課教師同意.
總人數上限:60人 
Ceiba 課程網頁
http://ceiba.ntu.edu.tw/982CE521_7270 
課程簡介影片
 
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課程概述

1. NANOTECHNOLOGY BASES
2. INTEGRATED CIRCUIT MANUFACTURING PROCESSES
3. FACTORY LAYOUT AND ARCHITECTURAL CONSTRUCTION
4. VIBRATION SOURCE, MEASUREMENTS.
5. HVAC CONSTRUCTION
6. ULTRA PURE WATER AND WASTE FACILITY CONSTRUCTION
7. POWER SYSTEMS CONSTRUCTION & GROUND SAFETY
8. DISTRIBUTED GAS & CHEMICAL SYSTEMS AND PIPING
9. EMERGENCY, SECURITY SYSTEMS AND AUTOMATIC CONTROL
AND INTELLIGENT FACTORY
10. CLEAN-BUILD & PROTOCOLS
11. CLEANROOM TESTING & COMMISSIONING
12. HIGH-TECH PROJECT MANAGEMENT
 

課程目標
THE PURPOSE OF THIS COURSE IS TO PROVIDE BASIC KNOWLEDGE NEEDED FOR FACILITIES THAT SUPPLEMENT HIGH-TECH MANUFACTURING. HIGH-TECH INCLUDES, NOT LIMITED TO, THE ADVANCED TECHNOLOGIES APPLIED IN THE FIELDS OF MICROELECTRONICS, OPTOELECTRONICS, PRECISION EQUIPMENT, TELECOMMUNICATION, NANOTECH, PHARMACEUTICS, BIOTECH, MEDICAL DEVICES, ANIMAL EXPERIMENT, AND AEROSPACE.
THE COURSE WILL ENABLE THE STUDENTS TO:
1. DIFFERENTIATE THE TYPICAL PROCESSES IN
SEMICONDUCTOR
2. CLASSIFY CLEANROOMS IN TERMS OF VARIOUS INTERNATIONAL STANDARDS.
3. SPECIFY THE ENVIRONMENTAL CONTROL CRITERIA FOR CLEANROOM IN TERMS OF TEMPERATURE AND HUMIDITY LEVEL, AIR/WATER QUALITY, PURITY OF CHEMICALS AND GASES, NOISE AND VIBRATION DEGREE, ELECTROMAGNETIC AND RADIO FREQUENCY INTERFERENCE, ELECTROSTATIC DISCHARGE, MATERIALS OUTGASSING, AND SAFE GROUNDING.
4. APPLY THE KNOWLEDGE IN TESTING AND COMMISSIONING CLEANROOM AND ITS ASSOCIATED FACILITIES.
5. LINK TO THE INFORMATION SOURCES FOR FURTHER STUDIES IN NANO/MICRO FABRICATION AND RESEARCH.
 
課程要求
 
預期每週課後學習時數
 
Office Hours
 
指定閱讀
 
參考書目
1. WHYTE, W., CLEANROOM TECHNOLOGY, JOHN WILEY, NEW YORK 2001  
評量方式
(僅供參考)
   
課程進度
週次
日期
單元主題
Week 1
2/23  Course Introduction Wafer Manufacturing & Profitability
 
Week 2
3/02  Nanotechnology Bases and Integrated Circuit Manufacturing High-tech Facility Construction Management Overview
 
Week 3
3/09  Site Mobilization and Building Construction 
Week 4
3/16  Clean Construction and Protocols 
Week 5
3/23  Mechanical, Electrical and Plant (MEP) Construction 
Week 6
3/30  High Purity Utilities, Ultra Pure Piping, Hook-Up, & Tool -Up 
Week 7
4/06  NTU Book-Study Holidays. No Class 
Week 8
4/13  Facility Start up, Commissioning and Cleanroom Verification 
Week 9
4/20  No Mid-Term Exam, Field Trips on 3/20, 5/8 
Week 10
4/27  TFT, Photovoltaic, and LED Manufacturing Processes & Construction  
Week 11
5/04  Bio-Experimental Lab, BS-P3 & Hospital Operation Room Construction 
Week 12
5/11  Fab Construction Project Management & Application of PMI’s Project Management of Body of Knowledge (PMBOK) 
Week 13
5/18  Scheduling, Time & Cost Trade-off for Crashing Schedule, and 4D Construction 
Week 14
5/25  Safety, Quality, Security and Risk Management 
Week 15
6/01  LEED and Green Building Construction 
Week 16
6/08  Construction Ethics and Legal Aspects  
Week 17
6/15  Term Project Presentation 
Week 4-1
3/21  Field Trip – Observations on TSMC High-tech Facility Construction, Sites 
Week 11-1
5/08  Field Trip to Biological Pilot Plant of Vaccine R&D Center, NHRI in Zoo-Nang and Taiwan Photon Source Construction Project in Hsin-Chu 
Week 14-1
5/29  Field Trip –TSMC Construction Project Management Controls (automation), Life Safety & 5D Integration