一、課程簡介:
1. Introduction
2. Lithography
3. Thermal Oxidation
4. Vacuum Technology
5. Thermal Evaporation
6. Glow Discharges and Plasmas
7. Sputtering
8. Chemical Vapor Deposition
9. Mechanical Properties of Thin Films
10. Dry Etching Techniques
11. Doping
12. Silicon Surface Micromachining
13. Silicon Bulk Micromachining
14. Mechanical Properties of Silicon
15. Piezoresistivity
16. Piezoelectricity
17. LIGA Thehnology
18. Applications

二、先修課程:
1. 普通物理
2. 材料力學

三、參考書目: