課程資訊
課程名稱
動態隨機存儲記憶體技術
DRAM technology 
開課學期
111-2 
授課對象
工學院  機械工程學系  
授課教師
廖洺漢 
課號
ME5069 
課程識別碼
522 U6470 
班次
 
學分
2.0 
全/半年
半年 
必/選修
選修 
上課時間
星期二3,4(10:20~12:10) 
上課地點
 
備註
與電機系劉致為特聘教授合開,上課地點為BL113(博理館東側一樓的教室113)。與劉致為合授
總人數上限:20人 
 
課程簡介影片
 
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課程大綱
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課程概述

Course structure:

Class 1
DRAM/SRAM/FLASH/MRAM/Emerging memory/...
Class 2
DRAM Design Device – 2hr
Class 3
Front End process- Photo - 2hr
Class 4
Front End process- Dry Etch Process - 2hr
Class 5
Front End process- DIR/TF/CMP/WET/RAM Process –part 1- 2hr
Class 6
Front End process- DIR/TF/CMP/WET/RAM Process –part 2- 2hr
Class 7
Front End process- DIR/TF/CMP/WET/RAM Process –part 3- 2hr
Class 8
SMAI(Smart Manufacturing & AI) (2hrs)
Class 9
Data Science – 2hr
Class 10
Mid-term exam – 2hr
Class 11
Quality Engineering- 2hr
Class 12
Yield rate Engineering - 2hr
Class 13
Backend process- part 1- 2hr
Class 14
Backend process- part 2- 2hr
Class 15
Field Application Engineering -(2 hrs)
Class 16
Final Exam

The detail agendas of each function:
- DRAM Design Device (DEG) -
DRAM Design, Device (DEG)
What's DRAM
DRAM Application
DRAM Architecture
Product Testing

- FE Process -
Photo Process
Dry Etch Process
CMP Process
Thin Film Process
Diffusion Process
WET Process

- SMAI(Smart Manufacturing & AI -
Data engineering challenges in semiconductor data
Machine learning challenges in production
Deep learning for memory array failure classification
Data Science application in photolithography

- YE -
YE: DRAM probing and failure analysis

- Quality –
DRAM Advanced Defect detection and Methodology Application
Machine Learning on Advanced Process Control

- BE Package & Test –
Advanced package introduction - now and future
Memory Packaging Technology Roadmap

- Field Application Engineering –
Field Application Engineering
DRAM Basic Operations and (System) Design Considerations
Market requirements vs. different type of DRAM and trend
Features of DDR4/DDR5/LPDDR4/LPDDR5/GDDR6x
Near Memory, Main Memory and Far Memory
High speed memory design guide and considerations  

課程目標
讓學生了解DRAM的製程與設計。
隨著5G運用、人工智慧、雲端運算、智慧醫療和數位轉型,相關終端應用包含高階伺服器、AI運算顯示卡、雲端電腦及5G通訊等,不僅僅只是需要配置記憶體,記憶
體速度與功率表現直接攸關開發產品競爭力,多樣化記憶體產品應用及重要性正逐年提升 。為讓學員對DRAM具備基本知識,本課程除DRAM結構原理,將從前段的研發
設計、晶圓的生產製造、測試、故障分析與品質管理,到後段封裝測試以及產品應用,提供一系列的介紹,引導學員了解DRAM與應用與趨勢、技術及挑戰,以及記憶
體在台研發製造的戰略價值。 
課程要求
基本元件及製程技術,如半導體工程。
成績評量:期中(50%)及期末考(50%),可調整。 
預期每週課後學習時數
 
Office Hours
另約時間 
指定閱讀
 
參考書目
《Dynamic RAM : technology advancements / Muzaffer A. Siddiqi.》
https://ntu.primo.exlibrisgroup.com/discovery/fulldisplay?docid=alma991038570789804786&context=L&vid=886NTU_INST:886NTU_INST&lang=zhtw&search_scope=MyInst_and_CI&adaptor=Local%20Search%20Engine&tab=Everything&query=any,contains,Dynamic%20Random%20Access%20Memory&offset=80
《Dram circuit design : fundamental and high-speed topics / Brent Keeth ... [et al.]》
https://ntu.primo.exlibrisgroup.com/discovery/fulldisplay?docid=alma991003751329704786&context=L&vid=886NTU_INST:886NTU_INST&lang=zhtw&search_scope=MyInst_and_CI&adaptor=Local%20Search%20Engine&tab=Everything&query=any,contains,Dynamic%20Random%20Access%20Memory&offset=10
以上書目均在台大圖書館。  
評量方式
(僅供參考)
   
課程進度
週次
日期
單元主題
第03週
3/7  Opening
DRAM Design, Device (DEG) part1
What's DRAMDRAM Design, Device (DEG)
DRAM Application 
第04週
3/14  DRAM Design, Device (DEG) part2
DRAM Architecture
Product Testing
Dry Etch Process 
第05週
3/21  Photo Process 
第06週
3/28  Thin Film Process
Diffusion Process 
第08週
4/11  CMP Process
WET Process 
第09週
4/18  DRAM Advanced Defect detection
Methodology Application
DRAM probing and failure analysis 
第10週
4/25  Midterm exam 
第11週
5/2  SMAI(Smart Manufacturing & Artificial Intelligence)
Data engineering challenges in semiconductor data
Machine learning challenges in production
Deep learning for memory array failure classification 
第12週
5/9  Quality
CSM Overview & Machine Learning on Advanced Process Control
Data Science application in photolithography 
第13週
5/16  1. FAB AMC process & ESD/Cleanliness quality control
2. Incoming Material Quality control and detection introduction 
第14週
5/23  BE Package & Test
Assembly Package Introduction
Advanced package introduction - now and future 
第15週
5/30  Field Application Engineering
DRAM Basic Operations and (System) Design Considerations
Market requirements vs. different type of DRAM and trend
Features of DDR4/DDR5/LPDDR4/LPDDR5/GDDR6x
Near Memory, Main Memory and Far Memory
High speed memory design guide and considerations 
第16週
6/6  Final exam, TA interaction with students open discussion