課程名稱 |
薄膜技術與表面分析 Thin-film Technology and Surface |
開課學期 |
111-1 |
授課對象 |
工學院 化學工程學研究所 |
授課教師 |
吳嘉文 |
課號 |
ChemE5030 |
課程識別碼 |
524 U1800 |
班次 |
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學分 |
3.0 |
全/半年 |
半年 |
必/選修 |
選修 |
上課時間 |
星期四6,7,8(13:20~16:20) |
上課地點 |
綜503 |
備註 |
化工選修課程。與陳賢燁、闕居振、陳嘉晉合授 總人數上限:70人 |
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課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
課程大綱
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課程概述 |
Introduction to various fundamental techniques in analyzing thin-film materials. Lectures on different analytical theories. Students are provided with opportunities to operate experimental instruments and apparatuses. |
課程目標 |
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課程要求 |
Course Outline Instruction Hours remark
Topics Contents lecture demonstration experiment others1
Introduction 1. Thin-film technology and surface analysis 3
1.
X-ray diffraction and analysis of crystal phases on thin films
1. Thin-film deposition by the sol-gel method
2. Semiconductor chemical sensors
3. X-ray diffractive analysis 3 3
Synthesis and properties of electrochromic thin films 1. Spectro-electrochemical properties of electrochromic thin films
2. Fabrication and application of electrochromic devices
3. Performance evaluation on electrochromic devices 3 3
Atomic force microscope (AFM)
1. Tunneling effects
2. Application of tunneling effects
3. Atomic force microscope (AFM)
4. Lateral force microscope (LFM)
5. Phase imaging 3 3
Surface analysis by using XPS and Auger 1. Introduction to Surface analysis
2. XRF theory and
spectra
3. Auger theory and
spectra 3 3
Scanning electron microscopy (SEM) 1. Varieties and functions of electron microscopes
2. Comparisons between electron and optical microscopes
3. Machinery structure of electron microscopes
4. Points for attention for operating electron microscopes 3 3 |
預期每週課後學習時數 |
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Office Hours |
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指定閱讀 |
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參考書目 |
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評量方式 (僅供參考) |
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