課程概述 |
Microelectromechanical Systems (MEMS) enable tiny devices or systems that can realize functions not easily achievable via transistor devices alone. This course focuses on the physical principles, tools, methodologies needed to properly model various types of MEMS sensors that are extensively used in our daily life. In addition, characterization of such MEMS sensors using open-source hardware will be covered through several hands-on laboratory sessions. |