一、課程簡介:

二、先修課程:

三、參考書目:
Course :　 Fabrication and Design in Optical MEMS
Instructor:黃 榮 山 (Institute of Applied Mechanics, Rm 419, (02) 2363-0979 ext. 419)

Topics:
1. Introduction to optical MEMS
2. Advanced MEMS process
CMOS, MUMPs
Process integration
2. Fabrication and design of micro optics
micro lens, Fresnel lens, blaze grating,
3. Actuation for optical MEMS
4. Optical MEMS in optical communication
Basic concept of optical communication
Optical switches
5. Optical MEMS in display
Concepts of digital light processing
Digital micro mirror
6. Uncooled thermal infrared imaging system
Principle, fabrication

Recommended Textbooks:
1. Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, 1998 (McGraw-Hill).
2. Jacob Fraden, AIP Handbook of Modern Sensors: Physics, Designs and Application, 1993 (American Institute of Physics).
3. Williams S. Trimmer (ed), Micromechanics and MEMS: classic and seminal papers to 1990, 1996 (IEEE Press).

Grading:
1. Homework 30 %
2. Final 20 %
3. Two term Projects 50 %

Prerequisite:
Introduction to MEMS (543 M5720)