課程名稱 |
微光機電系統製程與設計 Fabrication and Dessign in Optical Mems |
開課學期 |
101-2 |
授課對象 |
學程 光電科技學程 |
授課教師 |
黃榮山 |
課號 |
AM7076 |
課程識別碼 |
543 M5770 |
班次 |
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學分 |
3 |
全/半年 |
半年 |
必/選修 |
選修 |
上課時間 |
星期二3,4,@(10:20~) |
上課地點 |
應107 |
備註 |
總人數上限:35人 |
Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/1012omems |
課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
課程大綱
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課程概述 |
Course : Fabrication and Design in Optical MEMS
Instructor:黃 榮 山 (Institute of Applied Mechanics, Rm 419, (02) 3366-5653)
Topics:
1. Introduction to optical MEMS
2. Advanced MEMS process
CMOS, MUMPs
Process integration
2. Fabrication and design of micro optics
micro lens, Fresnel lens, blaze grating,
3. Actuation for optical MEMS
4. Optical MEMS in optical communication
Basic concept of optical communication
Optical switches
5. Optical MEMS in display
Concepts of digital light processing
Digital micro mirror
6. Uncooled thermal infrared imaging system
Principle, fabrication
Grading:
1. Homework 30 %
2. Final 20 %
3. Two term Projects 50 %
Prerequisite:
Introduction to MEMS (543 M5720)
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課程目標 |
-From MEMS to Optical MEMS
-Poly-MUMPs
-SOI MEMS
-CMOS-MEMS
-Actuators
-Bio-photonics MEMS
-MEMS on Display
-MEMS in Fiber-optic communication |
課程要求 |
Grading:
1. Lab project(3) 40 %
2. Final 45 %
3. Q&A session 15 % |
預期每週課後學習時數 |
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Office Hours |
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指定閱讀 |
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參考書目 |
Recommended Textbooks:
1. Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, 1998 (McGraw-Hill).
2. Jacob Fraden, AIP Handbook of Modern Sensors: Physics, Designs and Application, 1993 (American Institute of Physics).
3. Williams S. Trimmer (ed), Micromechanics and MEMS: classic and seminal papers to 1990, 1996 (IEEE Press).
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評量方式 (僅供參考) |
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