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課程概述 |
Course : Fabrication and Design in Optical MEMS
Instructor:黃 榮 山 (Institute of Applied Mechanics, Rm 419, (02) 3366-5653)
Topics:
1. Introduction to optical MEMS
2. Review in MEMS
- CMOS-MEMS
- poly-MUMPs
- SOI-MUMPs
3. Technology Review: semiconductor industry,
TFT-LCD, OLED & touch panel industries
4. Technology Review: LED & Solar industries
5. Biomedical applications:
-Miniaturized medical devices in tele-medicine
- Biomolecules: MEMS vs. ELISA, SPR, FPIA, ….)
- Cell: micro-fluidics +MEMS vs. Flow cytometry …)
6.Microdisplay
- MEMS actuators
- MEMS in display I (DMD, MEMS autofocus, MEMS scanner,
- MEMS in display II (Qulcomm. MEMS display,
7. Fiber-optic communication
- MEMS in fiber-optic communication
- tunable laser/detector, optical switch, attenuators,
micro-optics: lens, v-groove, prism)
8. Other applications
Grading:
1. Hands-on lab project 45 %
2. Final 40 %
3. Q&A questions 15 %
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參考書目 |
Recommended Textbooks:
1. Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, 1998 (McGraw-Hill).
2. Jacob Fraden, AIP Handbook of Modern Sensors: Physics, Designs and Application, 1993 (American Institute of Physics).
3. Williams S. Trimmer (ed), Micromechanics and MEMS: classic and seminal papers to 1990, 1996 (IEEE Press).
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