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課程名稱 |
微感測器
Micro Sensors |
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開課學期 |
100-1 |
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授課對象 |
電機資訊學院 電機工程學研究所 |
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授課教師 |
田維誠 |
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課號 |
EE5055 |
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課程識別碼 |
921 U2510 |
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班次 |
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學分 |
3 |
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全/半年 |
半年 |
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必/選修 |
選修 |
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上課時間 |
星期二6,7,8(13:20~16:20) |
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上課地點 |
電二104 |
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備註 |
總人數上限：50人 |
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Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/1001microsensor |
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課程簡介影片 |
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核心能力關聯 |
本課程尚未建立核心能力關連 |
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課程大綱
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為確保您我的權利,請尊重智慧財產權及不得非法影印
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課程概述 |
1. Micro sensor/actuators are miniature devices
•Created by various micro-fabrication techniques
•Capable of performing and transferring mechanical, electrical, optical,
fluidic, and other types of signals
•Able to bridge the electronic systems to the real world
2. This course introduces this emerging and multi-disciplinary research field in
MEMS/Sensors and Actuators/Microsystems Areas
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課程目標 |
1. To apply project management skills for homeworksand final project presentations (team forming; Gann chart: identify roles and define tasks; technology benchmark: papers and patents survey; communication: presentation and writing)
2. To build a happy learning attitude of biomedical micro/nanoanalytical systems |
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課程要求 |
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預期每週課後學習時數 |
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Office Hours |
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指定閱讀 |
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參考書目 |
•Kovacs, Gregory T.A., Micromachined Transducers Sourcebook, McGraw Hill, 1998
•Madou, M., Fundamentals of Microfabrication, CRC Press, Inc. Boca Raton, FL., 1997
•Senturia, S.D., Microsystem Design, KluwerAcademic Publishers, 2000 |
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評量方式
(僅供參考) |
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No. |
項目 |
百分比 |
說明 |
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1. |
Class Interaction |
10% |
1. 2-3 in-class quiz.
2. Open Book and Open Discussion. |
2. |
2 Homework Sets |
20% |
1. Due at the beginning of the following course.
2. Late homework:
-Within one day: 20% off
-Over one day: 50% off
-Over one week: Ah… do the next one |
3. |
1 Midterm |
30% |
Single page with double-sided cheat-sheet is available, no discussion in midterm!! |
4. |
Final Project |
40% |
Oral:20%; Report: 20% |
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週次 |
日期 |
單元主題 |
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第1週 |
9/13 |
Course Introduction |
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第2週 |
9/20 |
Semiconductor Processing Technologies |
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第3週 |
9/27 |
Silicon Micromaching Technologies-Bulk Micromachining |
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第4週 |
10/04 |
Silicon Micromaching Technologies-Surface Micromachining |
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第5週 |
10/11 |
MEMS fabrication Technologies-CMOS MEMS |
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第6週 |
10/18 |
MEMS fabrication Technologies-Non Si Process |
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第7週 |
10/25 |
Study Week |
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第8週 |
11/01 |
Study Week |
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第9週 |
11/08 |
Midterm |
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第10週 |
11/15 |
No class |
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第11週 |
11/22 |
Introduction to Mechanical Structure and Modeling |
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第12週 |
11/29 |
Capacitive & PiezoresistiveSensors/Actuators |
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第13週 |
12/06 |
Resonance, Optical & Electro-Thermal Sensors/Actuators |
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第14週 |
12/13 |
Biomedical Sensors/Actuators |
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第15週 |
12/20 |
Fundamentals of electrical circuits/systems for sensors and actuators |
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第16週 |
12/27 |
Fundamentals of electrical circuits/systems for sensors and actuators |
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第17週 |
1/03 |
Final Project Presentation |
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