課程資訊
課程名稱
短波長半導體工程
SHORT-WAVELENGTH SEMICONDUCTOR ENGINEERING 
開課學期
94-1 
授課對象
電機資訊學院  光電工程學研究所  
授課教師
馮哲川 
課號
OE5029 
課程識別碼
941EU0380 
班次
 
學分
全/半年
半年 
必/選修
選修 
上課時間
星期三5,6,7(12:20~15:10) 
上課地點
博理103 
備註
以英語授課。
總人數上限:20人 
 
課程簡介影片
 
核心能力關聯
核心能力與課程規劃關聯圖
課程大綱
為確保您我的權利,請尊重智慧財產權及不得非法影印
課程概述

1) 內容- Contents: consisting of four major parts as
[A] Introduction to semiconductor engineering for short-wavelength application
[B] Crystal growth of semiconductors for short-wavelength application
Advanced industry production MOCVD systems (Emcore/Vecco, Aixtron, Thomas Swan);
High temperature (HT) sublimation growth of bulk SiC crystal;
HT chemical vapor deposition (CVD) of SiC heterospitaxy and homoepitaxy;
Epitaxy of GaN-based materials and quantum structures on Si, SiC and other substrates;
Pulse laser deposition and molecular beam epitaxy of GaN and SiC;
Various crystal growth tecniques on ZnO;
[C] Analysis Engineering for short-wavelength semiconductors
Polytype crystalline structures;
Stress and strain in layered structural materials;
Insitu epitaxy monitoring in MOCVD growth of short-wavelength semiconductors;
Interdisciplinary techniques for materials analysis on blue-UV semiconductors;
Optical analysis (Photoluminescence, Raman scattering, transmission/reflectance);
Structural analysis (high-resolution X-ray diffraction, electron microscopy);
Surface and Nuclear science/engineering analysis; Defects engineering.
[D] Nano-structural and device engineering in short-wavelength range
MOCVD growth of III-Nitrides Quantum dots; Growth of nano-structural SiC and ZnO;
Optical and structural properties of nano-structural short-wavelength semiconductors;
Processing techniques on nano-structural devices.
2) 教科書: No. References are provided in the course, and some are: Z C Feng/J H Zhao, Silicon Carbide Materials, Processing, and Devices (Taylor & Francis, 2003); Z C Feng, SiC Power Materials, Devices and Applications, Springer, 2004); J I Pankove/T D Moustakas, Gallium Nitride II (Academic, 1999).
3) 成績評量方式 : Homework (20%), mid-term exam (40%), final exam (40%)
4) 預修課程: No. (Notes – difference with the course Wide Gap Semiconductor Tech. (WGST): WGST uses Nakamura’s The Blue Laser Diode as textbook and is limited with mainly Nitrides and Nichia’s results. This course deals with much wide range of short-wavelength (or wide gap) semiconductor systems and more advanced growth/analysis engineering, emphasizing for industry.
 

課程目標
 
課程要求
 
預期每週課後學習時數
 
Office Hours
 
參考書目
 
指定閱讀
 
評量方式
(僅供參考)
   
課程進度
週次
日期
單元主題
無資料