課程名稱 |
奈米光電半導體製程技術 Nano Optoelectronics Semiconductor Processing Technology |
開課學期 |
99-2 |
授課對象 |
電機資訊學院 光電工程學研究所 |
授課教師 |
吳志毅 |
課號 |
OE5030 |
課程識別碼 |
941 U0390 |
班次 |
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學分 |
3 |
全/半年 |
半年 |
必/選修 |
選修 |
上課時間 |
星期二6,7,8(13:20~16:20) |
上課地點 |
明達205 |
備註 |
總人數限100人。 總人數上限:100人 |
Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/992OE5030 |
課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
課程大綱
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課程概述 |
Advanced nano-scale semiconductor technology
1.Advanced optical lithography and none-optical lithography: E-beam lithography, nano-imprint, and self-assembly process
2.Advanced CMOS: High-k gate oxide and metal gate
3.Advanced interconnect: Low-k materials and Cu process
4.Strained silicon in CMOS technology
5.SOI technology
6.SiGe and its application
7.Atomic-Scale Thin Films Deposition Techniques: Atomic Layer Chemical Vapor Deposition (ALCVD)
8.Characterization Techniques for Nano-science
Opto-electronic semiconductor technology
1.TFT-LCD technology
2.Conventional LED
3.Short-wavelength and white LED: GaN based LED
4.Organic LED
5.Digital camera: CCD vs. CMOS
6.Solar cell
7.Atomic-Scale Thin Films Deposition Techniques: Molecular Beam Epitaxy (MBE)
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課程目標 |
This is a new course which will introduce some of the modern semiconductor technology in both electronics and optical-electronics area. The content of the course can be separated into two main categories: (1) Advanced nano-scale semiconductor technology and (2) Optical-electronic semiconductor technology. The students who want to take this course need to have basic knowledge in semiconductor process technology. |
課程要求 |
Grading:Homework, Midterm, and Final Exam
Prerequisite:Semiconductor engineering |
預期每週課後學習時數 |
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Office Hours |
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參考書目 |
Textbook: No text book. Lecture note will be handed out in each class. |
指定閱讀 |
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評量方式 (僅供參考) |
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週次 |
日期 |
單元主題 |
第0週 |
07/02 |
期末成績 |